Sensors – Chemical, Physical & Bio – Page 33

Microsystem Modeling – from Macromodels to Microsystem Design

Husak M., University of Prague, CZ

The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real [...]

The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications

Atwell A.R., Balseanu M., Duster J.S., Hailu E., Kornegay K.T., Li C., Cornell University, US

We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]

Using Very Large Arrays of Intelligent Sensors

Newman R.M., Coventry University, UK

In 1994 the author patented an intelligent vibration sensor. The device was essentially an accelerometer with integrated analog and digital processing capability as shown in figure 1, which allowed a large proportion of the diagnostic [...]

Topic: Sensors - Chemical, Physical & Bio

Microsystem Modeling – from Macromodels to Microsystem Design

The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications

Using Very Large Arrays of Intelligent Sensors

Smart MEMS and Sensor Systems