Spectral engineering via complex patterns of rounded concave and convex nanoresonators achievable via integrated lithography realized by circularly polarized light

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Comparative study has been performed on the spectral and near-field properties of complex concave and convex nano-object patterns that can be fabricated via interferometric illumination of colloid sphere monolayers (IICSM) by applying circularly polarized light. Rectangular patterns of miniarrays composed of a central nanoring and satellite nanocrescents have been designed. Azimuthal orientation dependent spectral effects of the pattern period, composing nano-object shape and size parameters have been uncovered by re-illuminating the complementary patterns by linearly polarized light.

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Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 373 - 376
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-8-7