Modeling & Simulation of Microsystems – Page 51

Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators

Lamminmäki T., Ruokonen K., Tittonen I., Mattila T., Jaakkola O., Oja A., Seppä H., Seppälä P., Seppälä P., Kiihamäki J., Helsinki University of Technology, FI

In this paper, finite element method (FEM) simulations are used to model mechanical properties of MEMS resonators. Using a static displacement analysis the effective spring constant and mass are calculated. Non-linearity of the mechanical restoring [...]

Techniques for Coupled Circuit and Micromechanical Simulation

Chen J., Kang S-M, University of Illinois at Urbana-Champaign, US

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly [...]

A Method for Thermal Model Generation of MEMS Packages

Rencz M., Székely V., Kohári Zs., Courtois B., Micred Ltd., HU

MEMS applications are frequently thermally operated, so knowing the thermal characteristics of their packages is very important. This paper presents a method for the generation of reduced order dynamic thermal models, either from simulated or [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]

Integration of a Permeable Layer into Micro Coil Modelling and First Steps of Automatic Optimization

Rehfuß S., Peters D., Laur R., University of Bremen (ITEM), DE

Rectangular micro coils which are used in a wide range of applications (e.g. medical or automotive area) are the main components of appropriate wireless transmission systems for frequencies up to 20 MHz. As shown in [...]

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Schrag G., Zelder G., Wachutka G., Münich University of Technology, DE

With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]

Topic: Modeling & Simulation of Microsystems