Topic: Modeling & Simulation of Microsystems
System Model for MEMS based Laser Ultrasonic Receiver
This paper investigates the system modeling of a MOEMS based Laser Ultrasonic receiver system. See Figure 1 for a block diagram of the system. The LUT receiver is comprised of a laser, and an optical [...]
System Level Analysis for a Locomotive Inspection Robot with Integrated Microsystems
In this paper, we describe a locomotive inspection robot with integrated microsystems that comprises a micro pump, micro valves, micro channels, a sophisticated pressure amplification system with multi-bellows and biocompatible linear actuators with plastic coated [...]
Model for Flow Resistance of a Rare Gas Accounting for Surface Roughness
The contribution of surface roughness is included in the flow resistance of rare gas flow channels. The statistical properties of the surface are taken into account in the model applying a novel approximation for the [...]
Lumped Modeling of Thermal Inkjet Print Head
Lee Y-S, Kim M.S., Shin S., Shin S.J., Shin S., Shin S.J., CSE Center, Samsung Advanced Institute of Technology, KR
A lumped model is developed to improve the design of a thermally driven monolithic inkjet print head. The model is based on a two-dimensional heat conduction equation, an empirical pressure-temperature relation and a hydraulic flow-pressure [...]
Analysis and Verification of Processing Sequences
Hansen U., Triltsch U., Büttgenbach S., Germer C., Franke H-J, Institute for Microtechnology, Braunschweig, DE
In the field of micro technology new technologies are being developed and employed to generate increasingly complex microsystems. Due to this, engineers have to be acquainted with considerable knowledge about the different processing technologies in [...]
MEMS Technologies for Communications
Micromechanical (or umechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are [...]
Fabrication of 3-Dimesional Cu Coaxial Cylinder using Porous Silicon MEMS Technology
Therefore, this paper reports 3-dimensional Cu coaxial cylinder with a thick OPS(oxidized porous silicon) in low resistivity silicon for application of microwave and RF integrated circuit technology. A novel on-chip 3D coaxial cylinder was fabricated [...]
Numerical Simulations of Novel Constant-Charge Biasing Method for Capacitive RF MEMS Switch
In the capacitive RF MEMS SW, it has been shown that every 5V of increased actuation voltage decreases the lifetime by an order of magnitude. In this paper, a novel method for automatically controlling the [...]