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HomeTopicsMEMS & NEMS Devices, Modeling & Applications

Topic: MEMS & NEMS Devices, Modeling & Applications

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

Lott C.D., McLain T.W., Harb J.N., Howell L.L., Brigham Young University, DE
The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated [...]

Investigation into the Standardization of Micromechanical Components and their Simulation and Computation Using FEM — Case Study of Diaphragms

Weiss E., Welp E.G., Witzel U., Wieck A., Schmidt E., Ruhr University Bochum, DE
Although certain components (such as diaphragms or beams) are used recurrently in micromechanics, the degree of standardization of components that is familiear in classic mechanical engineering is still to a great extent unknown in this [...]

An Accurate Photodiode Model for DC and High Frequency SPICE Circuit Simulation

Swe T.N., Yeo K.S., Nanyang Technological University, SG
An accurate photodiode model for DC as well as high frequency SPICE circuit simulation is presented in this paper. The accuracy of the proposed model is verified with the measured data obtained from two different [...]

A Simple and Scalable Model for Spiral Inductors on Silicon

Sia C.B., Yeo K.S., Goh W.L., Swe T.N., Ma J.G., Do M.A., Lin J.S., Chan L., Nanyang Technological University, US
A new, simple and scalable inductor model for silicon-based spiral inductors has been presented in this paper. Compared to the conventional model, it can predict accurately the inductive characteristics and quality factor for inductors of [...]

Study of a Novel Isotropic Suspension Design for an Angular Gyroscope

Painter C., Shkel A., University of California Irvine, US
This paper describes the analysis of a novel isotropic suspension designed for use in a Micro Electro Mechanical System (MEMS) z-axis angular gyroscope.The suspension,consisting of six concentric interconnected rings rigidly attached to an anchored frame,supports [...]

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Jianqiang M., Shixin C., Yi L., Data Storage Institute, SG
The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]

MEMS Simulation in Heavily Doped Silicon Devices

Matsuda K., Kanda Y., Naruto University of Education, US
Simulation of the semiconductor transport under heavily doped and stressed conditions is presented. The degenerate statistics are introduced by taking into account the density-of-state functions for the band tail and the impurity band. The momentum-dependent [...]

On the Utility of Airborne MEMS for Improving Meteorological Analysis and Forecasting

Manobianco J., Short D.A., ENSCO, Inc., JP
Among the applications envisioned for Micro ElectroMechanical Systems (MEMS) sensors are weather observations from probes that are suspended in the atmosphere and carried by wind currents. This paper describes preliminary experiments with a state-of-the-science numerical [...]

A Novel Polymer Nanofiber Interface for Chemical and Biochemical Sensor Applications

Kwoun S.J., Lee R.M., Han B., Ko F.K., Drexel University, US
Polymer thin films are used extensively as a chemically sensing medium in variety types of acoustic sensors. It is well known that the sensitivity of a sensing film is proportional to the surface area of [...]

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

Kweon S., Lee H., Shin H., Samsung Electronics Co.Ltd., US
Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]

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