MEMS & NEMS Devices, Modeling & Applications – Page 34

Optimization of GaAs MEMS structures for Microwave Power Sensor

Jakovenko J., Husak M., Lalinsky T., Czech Technical University in Prague, CZ

This work discusses the thermo mechanical simulations performed with the aim to optimise the temperature distribution of the Microwave Power Sensor (MPS) microsystem keeping the thermal stress as low as possible. The concept of the [...]

Stress Optimization of a Micromechanical Torsional Spring

Klose T., Kunze D., Sandner T., Schenk H., Lakner H., Schneider A., Schneider P., Schneider A., Schneider P., Fraunhofer IPMS, DE

In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the [...]

Numerical Investigation of Phase-Changing Heat Transfer for Laser-Assisted Direct Nano Imprint Processing

Hsiao F-B, Wang D-B, Jen C-P, Lee Y-C, Chuang C-H, National Cheng Kung University, TW

Laser-Assisted Direct Imprinting (LADI), a novel and promising technique, has been proposed since 2002 to utilize an excimer laser to irradiate and heat the silicon surface through a highly-transparent quartz mold preloaded onto the silicon. [...]

Modeling of an Electroactive Polyimide Ultrasonic Wave Sensor for Aerospace Applications

Wilson W.C., Atkinson G.M., Perey D.F., Scott M.A., Tedjojuwono K.K., NASA LaRC, US

We have modeled a new, low cost polyimide Capacitive Micromachined Ultrasonic Transducer (CMUT) device constructed using a polyimide membrane. This paper presents the preliminary results of the electromechanical modeling of this new device. Polyimide was [...]

Extraction of Damping Coefficients of Comb Drive by Partitioning

Khaliq A., Liu X., Nohria R., Su Y., Varahramyan K., Louisiana Tech University, US

Accurate prediction of the dynamic behavior of comb-driven MEMS device is important to optimize the structure design. Viscous damping in the surrounding air determines the dynamic response of movable structures close to resonance. Viscose damping [...]

Symbolic Finite Element Analysis for Parametric Studies

Johnstone R.W., Shimizu T., Parameswaran M., Simon Fraser University, CA

In our paper, we will present a method of performing finite element analysis using a symbolic kernel. The representation of numbers used in analysis is symbolic expressions instead of floating point numbers. Unlike standard finite [...]

Electro-Static Membrane Model in CAD

Zubert M., Napieralska M., Napieralski A., Department of Microelectronic and Computer Science, PL

The model simplification is one of the most important problems in its design process. Every so often this approach tends to the physical phenomena violation, exceeding assumed domains or published models (and commercial software) application [...]

Effects of Etch Holes in Microelectromechanical Resonators

Yan J., Seshia A.A., University of Cambridge, UK

Micromachining processes such as surface machining of polysilicon microstructures or SOI-based processes often require etch holes to be created in the structural layer for purposes of releasing the mechanical structures. The present work examines the [...]

Computational Modeling of a Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate

Saeidi S.M., Khodadadi J.M., Johnson C.A., Lee C., Yang E.H., Auburn University, US

Computational modeling of liquid flow in a piezoelectrically actuated microvalve is discussed. A 3-D structured mesh with 330,000 hexahedral cells that represents the major features of the microvalve was generated for the numerical model. Due [...]

Three Degrees of Freedom Thermal Microactuator

Pasupuleti A., Sahin F., Walter W.W., Raisanen A., Hebding J.L., Hirschman K.D., Rochester Institute of Technology, US

This research is focused on the design and fabrication of a three-degrees-of-freedom (DOF) polyimide-based thermal microactuator. The proposed actuator can have displacements simultaneously in the X, Y and Z axes. The operation of the microactuator [...]