Sector: Sensors, MEMS, Electronics
The Coupled-Domain System Simulation/Simulatability Problem
This paper discusses the diculties in current approaches to modeling and simulation of coupled-domain systems and presents new approaches and solutions to simulation execution and the model-simulation gap. The ongoing paradigm shift toward coupled-domain systems [...]
Efficient Simulation of MEMS Using Element Stamps
This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into [...]
Challenges in CMOS-MEMS Extraction
CMOS micromachining processes are being increasingly used to fabricate integrated MEMS devices. Verification of such designs requires extraction from layout to mixed domain circuits and MEMS schematics for lumped parameter simulation. The higher etch hole [...]
Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators
Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (SDM) type control structure. The order [...]
Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer
This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta [...]
Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels
Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the [...]
Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme
We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also [...]
Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams
Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]