TechConnect Proceedings Papers
Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition
Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch [...]