Papers – Page 828 – TechConnect Briefs

Enhancement of Silicon Photon Emission with Nanostructure Array

Li J.L., Kuan C.H., Peng Y.H., Lo H-C, Chen L-C, National Taiwan University, TW

Initiated by the high photon-emission nature of the porous silicon materials and the light transmission enhancement characteristics of the photonic crystals, the research of silicon Raman scattering of array nanostructures built by the electron beam [...]

UV Silicon Sensor Using Si Nanocrystals

Berman-Mendoza D., Aceves-Mijares M., Berriel-Valdos L., Domínguez-Horna C., Pedraza J., Falcony C., Carranza J., INAOE, MX

After the discovery of photoluminescence of silicon (Si) nanocrystals embedded in silicon dioxide a big effort has been done to understand such emission. However, almost not application of these characteristics can be found until now. [...]

Visible Light Emission from Si-related Nanostructures and the Effect of Ambient Atmosphere on Photoluminescence

Tsai M.-Y., Chi C.-C., Perng T.P., National Tsing Hua University, TW

Two different types of visible light emission were observed from the Si-related nanostructures prepared by vapor condensation in an Ar-5%O2 atmosphere at various working pressures (1, 30, 50, and 100 torr). The specimen prepared at [...]

Preparation of Sb Doped SnO2 SPM Tips and their Use as Transparent Probes in STM Induced Light Hybrid Microscopy

Tätte T., Jacobsen V., Paalo M., Branscheid R., Kreiter M., Mäeorg U., Saal K., Lõhmus A., Kink I., Tartu University, EE

Development of various kinds of sharp needles has been in focus of investigators since their application as sensors in scanning probe microscopy. Although transparent and conductive tips lead to several fascinating applications like STM/SNOM hybrid [...]

Fabrication and Characterization of 3D Square Spiral Photonic Crystals

Jensen M.O., Summers M.A., Brett M.J., University of Alberta, CA

Three-dimensional photonic crystals can be fabricated using the glancing angle thin film deposition technique (GLAD). These nanostructured thin films consist of a periodic array of micrometer-sized silicon square spirals, as proposed by O. Toader and [...]

Simulation Studies of Plasmon Enhanced Evanescent Near-Field Optical Lithography

Sefa-Ntiri B., Docker P., Ward M.C., Prewett P.D., University of Birmingham, UK

Evanescent Near-Field Optical Lithography (ENFOL) is an inexpensive route to nanolithography, overcoming the diffraction limitations of conventional optical technology. This paper details modelling work developed by the authors, to produce a predictive model that can [...]

Add-Drop Filters utilizing Vertically Coupled Microcavities in Silicon

Koonath P., Indukuri T., Jalali B., University of California, Los Angeles, US

Micro-resonant optical cavities facilitate dense integration of optical devices on a chip. Through vertical integration of devices, precise control over the critical dimension of the structure can be achieved. Add-drop multiplexers based on vertically coupled [...]

Optical Surface Diffraction and Improved Lateral Resolution

Bacsa W.S., Caumont M., CNRS, UPS, BU, US

Optical coherence plays an important role in the local field in the vicinity of surfaces where the incident and scatter field overlap (1). While phase differences are small in the optical nearfield, the longitudinal component [...]

Nano Tungsten Silicide Thin Film Deposition and its Integration with Poly-Silicon

Li M., Suryanarayanan Iyer R., Applied Materials Inc., US

The semiconductor transistor of 90 nm or below generation requires low resistance materials for gate metallization. A thin tungsten silicide (WSix) film is a candidate for the buffer material between poly-silicon and metal, such as [...]

Nanoscale Reaction Analysis of Resist Materials for Nanolithography

Kozawa T., Saeki A., Okamoto K., Tagawa S., Osaka University, JP

Recently, in semiconductor industry, elaborate extension of photolithography is getting closer to its capacity limit and post-optical lithographies have attracted much attention ever. Because they are capable of fabricating features below 32 nm, they are [...]