Papers – Page 751 – TechConnect Briefs

Adaptive Control for Reducing the Effect of Damping on the Output Signal of Microgyroscopes

Khalilyulin R., Hauck T., Wachutka G., Münich University of Technology, DE

A mixed-level modeling methodology is employed to set up a full system simulation model for microgyroscopes together with the control circuitry in order to investigate the performance of novel adaptive closed-loop control strategies, which allow [...]

Simulations of the Anchor Losses in MEM Disk Resonators

Paci D., Stoffels S., Tilmans H.A.C., IMEC, BE

MEM (Micro Electro Mechanical) resonators have been proposed as fundamental components in RF transmission systems; especially bulk mode resonators are very attractive devices because of their small size and their high resonance frequencies combined with [...]

Analytic Damping Model for a Square Perforation Cell

Veijola T., Helsinki University of Technology, FI

A compact model for a square perforation cell is derived. It is generated both analytically and with 3D FEM simulations of the structure. The model consists of six flow resistances, whose values are simple functions [...]

MEMS Process Characterization with an on-Chip Device

Garmire D., Choo H., Muller R.S., Govindjee S., Demmel J., UC-Berkeley, US

We have developed a CMOS-compatible, compact device and a simple procedure for measuring three important fabrication characteristics of planar-processed microelectromechanical (MEMS) structures: in-plane over- or under-cut, Young’s Modulus, and comb-drive forces in a MEMS process. [...]

Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures

Liu J., Fedder G.K., Sassolini S., Sarkar N., Carnegie Mellon University, US

A new Young’s modulus test structure has been designed and used in our lab. Simple models have been built in simulating lateral and vertical stress gradients. Test structures, measurements and FEA simulations are reported on [...]

Optimization of Piezoelectric Transformers Using Elite Genetic Algorithm

Kang C-Y., Lee C-K, Yang Y-J, National Taiwan University, TW

In this work, we present the optimization work for piezoelectric transformers (PT) by using the elite Genetic Algorithm (GA). The Finite-element solver, NTUPZE, is used to calculate the behaviors of piezoelectric transformers. The design parameters [...]

Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever beams. Multi-physics simulations of micro-electro-mechanical [...]

Adaptive temperature estimation in 3D single-cell dielectrophoretic traps using the boundary Element Method

Rosales C., Institute of High Performance Computing, A*STAR, SG

Application of dielectrophoresis techniques to biological particles is limited by the temperature increase of the suspension due to Joule heating. This temperature increase can be obtained from a Poisson equation, but the presence of the [...]

Numerical Capacitance Calculation for Mems Pressure Sensor by Method of Moments

Li P., Weber R.J., Iowa State University, US

MEMS-based capacitive pressure sensors have been widely used in many engineering applications. The design of a MEMS capacitance pressure sensor presents a number of challenges, one of which is the calculation of sensor capacitance and [...]

A Generic Scientific Simulation Environment for Multidimensional Simulation in the Area of TCAD

Heinzl R., Spevak M., Schwaha P., Grasser T., Institute for Microelectronics, AT

We will resented a completely generic scientific environment suitable for thearea of TCAD. Therewith it is possible for scientists to use a completetopological and numerical environment to develop applications with minimumoverhead or great knowledge of [...]