Papers – Page 557 – TechConnect Briefs

BioMEMS for Mitochondriaa Medicine

Padmaraj D., Zagozdzon-Wosik W., Xie Lei-Ming, Pijanowka D., Miller J.H., Grabiec P., Wosik J., Zagozdzon-Wosik W., University of Houston, US

We designed and fabricated BioMEMS for applications in subcelullar level studies, more specifically for monitoring complementary parameters important in mitochondria medicine.BioMEMS were first simulated using COMSOL 3.4 and then fabricated as an SU-8 based microfluidic [...]

Dielectrophoresis and Comsol Simulation of Cell Entrapment At Electrodes

Padmaraj D., Zagozdzon-Wosik W., Pande R., Miller J.H., Xie L-M, Wosik J., Zagozdzon-Wosik W., University of Houston, US

Dielectric properties of biological samples change with frequency of the interrogating electric field therefore can be used to obtain information about structures and various kinetic as well as bio-physical and –chemical processes in the cells. [...]

Design of Multi – Dimensional Variable Capacitors for RF MEMS

Lamba V.K., Engles D., Malik S.S., Gupta A., HCTM Kaithal, IN

Abstract— In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. The RF MEMS variable capacitor is designed [...]

Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications

Nam S-H, Kim M.H., Hyun J.S., Boo J.-H., Sungkyunkwan University, KR

Silicon carbide thin films were deposited on Si(100) substrates by metal-organic chemical vapor deposition(MOCVD) in high vacuum condition(2.010-7 Torr) using 1,3-disilabutane as a single source precursor which contains silicon and carbide in 1:1 ratio at [...]

Fabrication of Nanostructures on Curved Surfaces Using PDMS Stamp

Farshchian B., Park S., Louisiana State University, US

In this study we report on a simple and effective process that allows direct imprinting of micro- and nanostructures on concave and convex substrates using a flexible stamp and pressurized air . One of the [...]

Nanocomposite Contact Material for MEMS Switches

Ding C., MacDonald N.C., university of california, santa barbara, US

This work reports the development of a nanostructured composite contact material for improving the contact reliability of MEMS switches. The nanocomposite material was integrated into a bulk titanium MEMS (BT-MEMS) switch which was fabricated using [...]

Pneumatically driven Auxiliary Micro Tools for Desktop Factories

Hoxhold B., Büttgenbach S., Technische Universität Braunschweig, DE

This paper presents the design and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro [...]

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization

Je S.-S., Kim J., Kozicki M.N., Chae J., Arizona State University, US

We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits [...]

The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm

Cui W., Miles R.N., Su Q., State University of New York at Binghamton, US

A novel miniature silicon microphone diaphragm is described that is highly robust when subjected to stresses that may arise during the fabrication process. Residual stress produces major challenges in the fabrication of MEMS devices. This [...]

Advancement of Prototyping and Fabrication Techniques for Active Sensors and Microelectronics

Zunino J.L., Skelton D.R., U.S. Army ARDEC, US

U.S. Army ARDEC is developing the ability to custom design and integrate novel technologies into functional systems for the creation and advancement of active systems. This research being performed will directly and indirectly support the [...]