TechConnect Proceedings Papers
Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and Simulations
Detailed 2D electromechanical simulations of electrostatically-actuated beams reveal phenomena not captured by 1D or quasi-2D simulations. The behavior of the beam when in contact with a dielectric layer is studied. Capacitance-voltage measurements are used to [...]