Extraction of Dynamic HDL-A Models of Thermally Based Microsystems from Physical Simulations

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While analyzing the behaviour of complex systems it is not practical to carry out the simulation of the complete model a the physical level In order to move from simulations at tne physical level towards system modeling with more abstract representations. it is sometimes necessary to use lumped representations of a initially continuous system. Some of these lumped elements will be represented by a black-box model defined by a certain transfer function. This work addresses the problem of the identification of a continuous syster, namely a thermo-pneumatic microacruator. from irs ransient behavior as obtained from finite element modeling The influence of the integration algorithms is studied and a solunon is proposed to avoid its influence in the extracted transfer function. The final representation of the system is used in the simulation of a micropump by using an electronic simulator.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 157 - 162
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3