Papers – Page 1050 – TechConnect Briefs

Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm

Correia J.H., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Finite-Element-Methods (FEM) has been used to study the behavior of a non-planar composite diaphragm, which is to be used in a tunable Fabry-Perot-based silicon microinterferometer. The composite (Ag-mirrorAow-stress SiN membrane/Si-frame) diaphragm used exhibits: excellent flatness, [...]

On the Vibrations of a MEMS Gyroscope

Davis W.O., Pisano A.P., UC-Berkeley, US

In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. [...]

Micromachined Accelerometer Design, Modeling and Validation

Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US

Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]

Modeling and Characterization of an Integrated FET Accelerometer

Kniffin M.L., Wiegele T.G., Masquelier M.P., Fu H., Whitfield J., Motorola, Inc., US

The GFET accelerometer is an integrated inertial sensor based on a movable-gate field effect transistor. The complexity of the transduction principle and the tight tolerances associated with its manufacture necessitated a large range of simulation [...]

Hierarchical Representation and Simulation of Micromachined Inertial Sensors

Vandemeer J.E., Kranz M.S., Fedder G.K., Carnegie Mellon University, US

A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems (MEMS) is presented. In the NODAS methodology 2dal Design of Actuators and Sensors), microaccelerometers and microgyroscopes are designed as [...]

Analysis of Pressure Balanced MEMS Valves

Yang F., Kao I., SUNY-Stony Brook, US

Based on simple plate theory and the Bernoulli equation, the effect of fluid flow on the deformation of fluid driven MEMS diaphragm microvalve is investigated analytically and numerically. The static instability of such a microsystem [...]

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves

Oosterbroek R.E., Schlautmann S., Berenschot J.W., Lammerink T.S.J., van den Berg A., Elwenspoek M.C., University of TWente, NL

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained [...]

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