This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 528 - 533
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip