Zhang C., Wang W., Liu Y., Ye Y., Zhao W., He J., Wu W.
Peking University Shenzhen SOC Key Laboratory, CN
Keywords: FinFET, nanoscale, negative bias temperature instability (NBTI), R-T theory
A compact Negative Bias Temperature Instability (NBTI) model, which is based on a novel Reaction-Trapping (R-T) theory, is proposed to predict the static and dynamic NBTI degradation in nanoscale FinFET reliability simulation. This R-T theory is on the basis of the hypothesis that threshold voltage variation is induced by H atoms captured by either shallow or deep level traps in the gate oxide. The advantage of the novel NBTI model is demonstrated by comparing with the classical Reaction-Diffusion NBTI model. A good match between the proposed NBTI model and the experimental results is obtained in terms of the temperature dependence and the structure effect of nanoscale FinFETs.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational & Photonics
Published: June 15, 2014
Pages: 518 - 520
Industry sector: Sensors, MEMS, Electronics
Topic: WCM - Compact Modeling
ISBN: 978-1-4822-5827-1