tunable capacitor – TechConnect Briefs

Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices

Shavezipur M., Nieva P., Khajepour A., Hashemi S.M., University of Waterloo, CA

In this paper, a design technique is presented that can linearize the response of MEMS capacitive elements such as tunable capacitors, capacitive sensors and out-of-plane electrostatic actuators. The method combinations the electrode flexibility and nonlinear [...]

Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor

Kim Y., Lee S-G, Park S., Kyungpook National University, KR

In this paper, we have proposed and designed the new structure of a RF-MEMS voltage tunable capacitor, which have two-movable parallel plates using electrostatic method and can be fabricated by the MEMS technology. Capacitance of [...]

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Tinttunen T., Veijola T., Nieminen H., Ermolov V., Ryhanen T., Helsinki University of Technology, FI

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor

Chen J., Zou J., Liu C., Kang S-M, University of Illinois, CN

We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate [...]