squeeze-film damping – TechConnect Briefs

A New Pressure Threshold Sensor Based on Nonlinear MEMS Oscillator

Alsaleem F., Hasan M.H., University of Nebraska Lincoln, US

Pressure sensing is one of the earliest applications of Micro-Electro-Mechanical-Systems MEMS. Changing the pressure sensing element (such as capacitive and optical) size to the microscale has created opportunities to reduce power consumption and production costs [...]

Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

Nigro S., Pagnotta L., Pantano M.-F., Università della Calabria, IT

In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure [...]

Reduced-order modelling of the Reynolds equation for flexible structures

Missoffe A., Juillard J., Aubry D., SUPELEC, FR

A reduced-order modelling technique for the Reynolds equation - which governs squeeze-film damping in MEMS structures - is presented in this paper. It is valid for flexible structures and large displacements, the only hypothesis made [...]

Extraction of Damping Coefficients of Comb Drive by Partitioning

Khaliq A., Liu X., Nohria R., Su Y., Varahramyan K., Louisiana Tech University, US

Accurate prediction of the dynamic behavior of comb-driven MEMS device is important to optimize the structure design. Viscous damping in the surrounding air determines the dynamic response of movable structures close to resonance. Viscose damping [...]

Analytical Model for the Pull-in Time of Low-Q MEMS Devices

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]

Microplate Modeling under Coupled Structural-Fluidic-Electrostatic Forces

Younis M.I., Nayfeh A.H., Virginia Tech, US

We present a model for the dynamic behavior of microplates under the coupled effects of squeeze-film damping, electrostatic actuation, and mechanical forces. The model simulates the dynamics of microplates and predicts their quality factors under [...]

Compact Models for Squeeze-Film Damping in the Slip Flow Regime

Sattler R., Wachutka G., Technical Univeristy of Münich, DE

We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our [...]

A Full-System Dynamic Model for Complex MEMS Structures

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

For full characterization of a surface micromachined MEMS device, where the thickness of the moving layer is just a few times the gap size, the modeling has to take large-signal behavior and end effects into [...]

Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain

Sattler R., Schrag G., Wachutka G., Institute for Physics of Electrotechnology, DE

Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]

Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain

Sattler R., Schrag G., Wachutka G., Institute for Physics of Electrotechnology, DE

Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]