squeeze-film damping – Page 2 – TechConnect Briefs

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries

Yang Y-J, Yu C-J, National Taiwan University, TW

In this work, we present an application of an Arnoldi-based model order reduction (MOR) technique on squeezed-film damping (SQFD) effects for arbitrarily-shaped perforated geometries. The compact models generated by this approach not only can be [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE

We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

Phenomenological Model for Gas Damping of High-Speed Switches

Greywall D.S., Walker J.A., Busch P.A, Arney S.C., Bishop D.J., Boyd G.D., Frigo N.J., Goossen K.W., Iannone P.P., Ruel R.R., Yurke B., Bell Laboratories, Lucent Technologies, Inc., US

This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic [...]