squeeze film – TechConnect Briefs

Analytic Damping Model for a Square Perforation Cell

Veijola T., Helsinki University of Technology, FI

A compact model for a square perforation cell is derived. It is generated both analytically and with 3D FEM simulations of the structure. The model consists of six flow resistances, whose values are simple functions [...]

Investigation of the Dynamics of Microdevices – As a Design Tool

Seter D.J., Degani O., Kaldor S., Scher E., Nemirovsky Y., RAFAEL Microsystems Group, IL

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS [1]. In this work, a [...]

High-Fidelity and Behavioral Simulation of Air Damping in MEMS

Turowski M., Chen Z., Prezekwas A., CFD Research Corporation, US

The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipation, using different level models: 3D numerical solution of Navier-Stokes equations (using CFD-ACE from CFDRC), and circuit/behavioral model (in SPICE and Saber/MAST [...]