resonators – TechConnect Briefs

QUARTZ MEMS OSCILLATORS FOR HIGH-PERFORMANCE NAVIGATION AND WIRELESS COMMUNICATION SYSTEMS

Chang D.T., Yoon Y., Moyer H.P., Nguyen H.D., HRL Laboratories, LLC, US

Quartz MEMS resonators are attractive for use in oscillators for stable frequency control applications in navigation and wireless communication systems by virtue of their reduced cost, size, weight, and power (CSWaP), combined with the potential [...]

Silicon Crystal Effects in Modeling of MEMS Silicon Resonators

Ghaffari S., Ahn C.H., Ng E.J., Kenny T.W., Stanford University, US

Silicon has found considerable application in precision MEMS devices because it provides desirable high frequency and quality factor characteristics. Usually, MEMS resonators are built from single crystal silicon with proven long-term stability. It is experimentally [...]

MEMS Oscillators

Partridge A., SiTime Corp, US

MEMS oscillators are now replacing legacy quartz crystal oscillators. They provide higher performance, new features, improved reliability, shorter lead times, and reduced cost. We will present the highest performance MEMS oscillator to date, discussing the [...]

Silver Precipitation in Energy-Scavenging Aluminum Nitride Resonators

Alleyne F.S., Ford M., Gronsky R., Yen T.-T., Pisano A.P., University of California-Berkeley, US

Despite more than a decade of experience in manufacturing of nanoelectromechanical systems (NEMS) incorporating piezoelectric elements, modern devices are still plagued by delamination at the electrode/piezoelectric interface. Consequently the electric field essential to generate and [...]

AC and DC Applications of Three-Dimensional Nano-electro-mechanical-systems

Kaul A.B., Khan A.R., Megerian K.G., Bagge L., Epp L., Jet Propulsion Laboratory, US

AC and DC Applications of Three-Dimensional Nano-electro-Mechanical-Systems Anupama B. Kaul,1 (*)Abdur R. Khan,1,2 Krikor G. Megerian,1 Leif Bagge,1,3 and Larry Epp,1 1Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109 2Keck School of Medicine, [...]

Micromachined Glass-Blown 3-D Spherical Shells as Mechanical Vibratory Elements

Prikhodko I.P., Trusov A.A., Zotov S.A., Shkel A.M., University of California Irvine, US

This paper reports a non-contact experimental characterization of resonant modes in micromachined glass-blown spherical shells, enabling new architectures of vibratory 3-D MEMS for signal processing, timing, and inertial applications. Wafer-scale glassblowing was previously developed for [...]

Nano-gap high quality factor thin film SOI MEM resonators

Grogg D., Tekin C.H., Badila-Ciressan D.N., Tsamados D., Mazza M., Ionescu M.A., Ecole Polytechnique Fédérale de Lausanne, CH

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization [...]

Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

Stoffels S., Fernández L.J., Puers R., Tilmans H.A.C., IMEC, BE

Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz [...]

NEMS Mass Sensor by Focused Ion Beam Fabrication

Boonliang B., Prewett P.D., Ward M.C.L., Docker P.T., Birmingham University, UK

Due to rising industrial demands (food, biology, control), there is a drive to develop smaller, more sensitive sensor-devices with real-time capability. The objective of this work is to utilise Focused Ion Beam (FIB) fabrication technology [...]

MEMS Resonator Tuning using Focused Ion Beam Platinum Deposition

Enderling S., Jiang L., Ross A.W.S., Bond S., Hedley J., Harris A.J., Burdess J.S., Cheung R., Zorman C.A., Mehregany M., Walton A.J., University of Edinburgh, UK

This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a [...]