Experimental mechanical stress characterization of MEMS by using of confocal laser scanning microscope with a Raman spectroscopy interface

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In this study, we demonstrate mechanical stress and shape profile measurements using confocal laser scanning microscopy (CLM) interface for Raman spectroscopy and that this system is reasonable and helpful to the MEMS designer. By combining [...]

Surface Enhanced Raman Scattering by 2D Photonic Crystals: Enhancement and Reproducibility

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Surface Enhanced Raman Scattering (SERS) is a widely utilised technique to enhance the weak Raman spectrum of molecules, enabling detection and identification of ultralow concentrations of particular species. We show both experimentally and theoretically how [...]

Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy

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We characterize and measure the pre-released residual stress levels in polysilicon Micro-Electro-Mechanical Systems (MEMS) microbridges using micro-Raman spectroscopy. Raman spectroscopy is nondestructive, fast, and provides the potential for in situ stress monitoring during fabrication. Residual [...]