process simulation – TechConnect Briefs

Computed Metallofullerene Yields in the X@C74 and Z@C82 Series

Slanina Z., Akasaka T., Nagase S., Institute for Molecular Science, JP

A series of metallofullerene formations X@Cn with one common cage Cn and variable encapsulated metals X is treated. The equilibrium composition of the reaction mixture is controlled by the encapsulation equilibrium constants and the saturated [...]

Merging Atomistic and Continuum Simulations of Silicon Technology – The Best from the Two Worlds

Pichler P., Fraunhofer Institute for Integrated Circuits, DE

Simulation of diffusion processes during front-end silicon process stepes needs to address a variety of highly complicated phenomena. In industrial environments, such simulations are nearly entirely based on continuum approaches. The physics entering into the [...]

Practical Atomistic Dopant Diffusion Simulation of Shallow Junction Fabrication Processes and Intrinsic Fluctuations for sub-100nm MOSFETs

Hane M., Ezaki T., Ikezawa T., NEC Corporation, JP

We studied sophisticated shallow junction fabrication processes, i.e. spike-annealing and flash-lamp annealing, using our recently developed atomistic dopant diffusion simulator. Through its use of kinetic Monte Carlo procedure, considering all the possible charged species and [...]

Keywords: process simulation

Computed Metallofullerene Yields in the X@C74 and Z@C82 Series

Merging Atomistic and Continuum Simulations of Silicon Technology – The Best from the Two Worlds

Practical Atomistic Dopant Diffusion Simulation of Shallow Junction Fabrication Processes and Intrinsic Fluctuations for sub-100nm MOSFETs

Process and Device Calibration for 31/51nm NMOS/PMOS Devices fabricated by Direct Write E-Beam

Process and Device Calibration for 31/51nm NMOS/PMOS Devices fabricated by Direct Write E-Beam

A 2D Visualization Tool for SUMMiT V Designs

Modeling of Deposition Process by Level Set Method

Towards Predictive TCAD and Fab Integration

Modeling and Simulation of 3D Structures for Gigabit DRAM

Systematic Global Calibration of a Process Simulator