Nanoimprinting – TechConnect Briefs

Electrochemical Nanoimprinting of Silicon: A Direct Patterning Approach

Azeredo B., Arizona State University, US

Soft-lithography and nanoimprinting lithography have been critical in manufacturing 3D features with sub-20 nm resolution onto polymeric materials which have often been employed for producing micro and nanoscale optical materials and surfaces. However, methods for [...]

Fabrication of Polymeric Membranes with Micro and Nano Apertures over Large Areas

Li K., Hernández-Castro J.A., Veres T., National Research Council of Canada, CA

Micro- and nano-porous membranes have a wide range of applications including plasmonics, data storage, and energy devices, as well as biomedical devices. Most of them use Si, SiN, or highly periodic anodic alumina membranes. They [...]

Fabrication of polymer-derived ceramic nanostructures by imprint lithography

Duong B., Gangopadhyay P., Brent J., Seraphin S., Thomas J., University of Central Florida, US

The conventional technique used for manufacturing miniaturized ceramic components is the powder route which typically does not allow the fabrication of feature sizes smaller than 0.1mm. With the availability of pre-ceramic polymers, processed by various [...]

Nanofluidic Channel Based Single Molecular Sensors in Polymer Substrate Fabricated by Novel Nanoimprinting Processes

Wu J., Chantiwas R., Soper S.C., Park S., Louisiana State University, US

One critical challenge in developing innovative nanochannel-based sensors for bio/chemical analyses is to build multiscale structures composed of narrow, long and continuous fluidic nanochannels and microfluidic networks at low cost. We presents a novel process [...]

Hierarchically Branched Gecko Tapes Imprinted Using Porous Alumina Templates

Yee A.H.Y., Lam Y.C., Institute of Materials Research and Engineering, SG

In this work, we show the methodology to fabricate hierarchical nano-structures of various geometrical parameters to mimic closely gecko’s adhesion system. The relevant geometrical parameters investigated are a) the aspect ratio of the fibrils b) [...]

Step and Flash Imprint Lithography for the Fabrication of Shape-specific, Enzymatically-triggered, Drug Nanocarriers

Caldorera-Moore M., Glangchai L.C., Shi L., Roy K., The University of Texas at Austin, US

Current concepts in the synthesis of nanocarriers primarily involve the use of polymers or lipids to fabricate self-assembled or emulsion-based particles that are mostly spherical, polydisperse, and release drugs through diffusion or hydrolysis. Although significant [...]

New Localized Surface Plasmon Resonance Sensor Utilizing Nanoimprinting Technology

Matsushita T., Nishikawa T., Yamashita H., Nakamura M., Hasui R., Aoyama S., OMRON Corporation, JP

A new localized surface plasmon resonance sensor fabricated by the nanoimprinting technique is presented. Nanoimprinting, one of the most important nanofabrication technologies, can produce stable nanopatterns on a substrate with high throughput. In this study, [...]

Numerical Investigation of Phase-Changing Heat Transfer for Laser-Assisted Direct Nano Imprint Processing

Hsiao F-B, Wang D-B, Jen C-P, Lee Y-C, Chuang C-H, National Cheng Kung University, TW

Laser-Assisted Direct Imprinting (LADI), a novel and promising technique, has been proposed since 2002 to utilize an excimer laser to irradiate and heat the silicon surface through a highly-transparent quartz mold preloaded onto the silicon. [...]

Wafer Scale Aligned Sub-25nm Metal Nanowires on Silicon (110) using PEDAL Lift-off Process

Sonkusale S.R., Amsinck C.J., Nackashi D.P., Di Spigna N.H., Barlage D., Johnson M., Franzon P.D., North Carolina State University, US

We have demonstrated a new PEDAL process to make sub-25 nm nanowires across the whole wafer. The PEDAL process is useful in the fabrication of metal nanowires directly onto the wafer by doing shadow metalization [...]