Nanofluidic Channel Based Single Molecular Sensors in Polymer Substrate Fabricated by Novel Nanoimprinting Processes

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One critical challenge in developing innovative nanochannel-based sensors for bio/chemical analyses is to build multiscale structures composed of narrow, long and continuous fluidic nanochannels and microfluidic networks at low cost. We presents a novel process using direct imprinting into polymer substrates to produce the nanofluidic sensor structure for single molecular analysis in a cost-effective way. The key for the process is to use polymer stamps to reduce stress generated during imprinting.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 21, 2010
Pages: 468 - 471
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4398-3402-2