microactuator – TechConnect Briefs

Gentle Micropump based on Microelectromagnetic Actuator

Al-Halhouli A.T., Waldschik A., Kilani M.I., Büttgenbach S., Technische Universität Braunschweig, DE

This work presents the fabrication and development of a new multifunction micropump based on integrated electromagnetic microactuator. The novel design consists of a fluidic chip, two microfabricated polymer magnets and chip cover. These components form [...]

Characterization of an Electro-thermal Microactuator with Multi-lateral Motion in Plane

Pan C.H., Chen Y.K., Chang C.L., National Chin-Yi Institute of Technology, TW

We present a new electro-thermal microactuator to have multi-lateral motion in plane by only varying voltage potentials at the contact pads. To extend the operating function, the larger operating range or multi-mode switch, relay and [...]

Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization

Ongkodjojo A., Tay F.E.H., Akkipeddi R., Institute of Materials Research & Engineering, SG

A new AlAs/GaAs-based multimorph microactuator (Fig. 1) is designed and modeled for micro-opto-electro-mechanical systems (MOEMS) applications. As the piezoelectric-based III-V materials such as AlAs/GaAs have small piezoelectric constants, we have developed the Simulated Annealing (SA)-based [...]

Analysis of AC-Driven Electroosmotic Flow in a Microchannel Packed with Microspheres

Kang Y.J., Yang C., Huang X.Y., Nanyang Technological University, SG

This paper presents a theoretical study on the AC-driven electroosmotic flow in both open and closed cylindrical microchannels packed with uniform microspheres. The time-periodic oscillating electroosmotic flow in an open microchannel in response to the [...]

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator

Lott C.D., McLain T.W., Harb J.N., Howell L.L., Brigham Young University, DE

The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated [...]

Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives

Jianqiang M., Shixin C., Yi L., Data Storage Institute, SG

The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from [...]

Dynamics in a Thermal Ink Jet: A Model for Identification and Simulation

Rembe C., aus der Wiesche S., Hofer E.P., University of Ulm, DE

In this paper a newly developed model for identification and simulation of dynamic phenomena in a thermal ink jet is presented. As a result of the modeling the calculation of the pressure propagation in the [...]

Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

Rembe C., Hofer E.P., Tibken B., University of Ulm, DE

Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on [...]