MEMS – Page 8 – TechConnect Briefs

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications

Chakraborty S., Bhattacharyya T.K., Indian Institute of Technology (IIT), Kharagpur, IN

This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to [...]

Mechanical Robustness of FPA in a-Si Microbolometer with Fine Pitch

Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Jang W.S., Kim B.I., Kim H-Y, Kim K-M, Kim T-H., Kang T.Y., National Nanofab Center, KR

Uncooled microbolometer has the various applications in many commercial and military applications. Among many sensor materials, amorphous Si have been widely used as sensor materials for their good TCR (Temperature Coefficient of Resistance), mechanical strength, [...]

Carbon-based Nanoelectronic Devices for Space Applicatoins

Kaul A.B., Khan A.R., Megerian K.G., von Allmen P., Bagge L., Epp L., Baron R.L., Jet Propulsion Laboratory, US

The microelectronics industry based on Silicon (Si) continues to push the limits on scaling, which has created unique opportunities for nanoscale materials, such as carbon nanotubes (CNTs) and carbon nanofibers (CNFs). We will describe our [...]

Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study

Chaehoi A., Weiland D., O’Connell D., Bruckshaw S., Ray S., Begbie M., Institute for System Level Integration, UK

This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access “one-stop-shop” prototyping facility for integrated MEMS. This work addresses the [...]

Advanced In- and Out-off plane High Resolution X-ray Strain Analysis on MEMS

Neels A., Dommann A., CSEM, CH

Related to the dramatically smaller volume of microelectromecanical systems (MEMS), new methods in testing and qualification are needed. In single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects during the MEMS [...]

In-situ MEMS Testing

Dommann A., Neels A., Schifferle A., Mazza E., CSEM, CH

In microsystems technology, new methods in testing and qualification are needed related to the dramatically smaller volume of microelectromecanical systems (MEMS). In single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects [...]

Application of YAG Laser Micro-Welding in MEMS Packaging

Bozorgi P., university of california, santa barbara, US

This paper reports a new packaging method for a wide range of MEMS for application on both the wafer and device scale. We show a complete set of experimental and modeling results for the application [...]

Preparation of nickel doped multi-functional micro-patternable polydimethylsiloxane nanocomposite polymer with characterization of its magnetic, electrical and mechanical properties for soft MEMS/Lab on a chip applications

Khosla A., Korand J.L., Haiducu M., Gray B.L., Leznoff D.B., Parameswaran M., Simon Fraser University, CA

We present the preparation and characterization of a novel polydimethylsiloxane (PDMS) multifunctional nanocomposite with electric and magnetic properties. The composite is fabricated by ultrasonic agitation of nickel nanoparticles in the PDMS matrix. The prepared nanocomposite [...]

Automatically Generated and Experimentally Validated System-Level Model of a Microelectromechanical RF Switch

Niessner M., Schrag G., Wachutka G., Iannacci J., Margesin B., Münich University of Technology, DE

In this work, we present a mixed-level model of an electrostatically actuated and viscously damped ohmic radio frequency (RF) microelectromechanical switch, which provides an accurate physical description of the device behavior and is suitable for [...]

A Solid Electrolyte Valve for Micro/Nano-fluidics

Yang Y., Zhang X., Kozicki M.N., Chae J., Arizona State University, US

This paper describes recent work on a valve to regulate liquid flow in micro/nano-fluidic channels using electrodeposited nanostructures on a solid-state AgGeSe electrolyte. The valve utilizes the extremely rough surface morphology of the electrodeposits to [...]