MEMS – Page 34 – TechConnect Briefs

Nodal Analysis for MEMS Design Using SUGAR v0.5

Zhou N., Clark J.V., Pister K.S.J., UC-Berkeley, US

This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR vO.5 can perform DC, [...]

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Ramaswamy D., Aluru N.R., White J.K., Massachusetts Institute of Technology, US

In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that [...]

Coupling of Length Scales and Atomistic Simulation of a MEMS Device

Rudd R.E., Broughton J.Q., SFA, Inc., US

We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately [...]

A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations

Aluru N.R., White J.K., Massachusetts Institute of Technology, US

It is well known that MEMS based microfluidic devices operate in very low Reynolds number regime (Re < 1). Analysis and design of such microfluidic devices requires the solution of incompressible viscous fluid flow or [...]

Network-Type Modeling of Micromachined Sensor Systems

Lorenz G., Neul R., Robert Bosch GmbH, DE

This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared [...]

Reliability Issues in Microelectromechanical Systems

Avula X.J.R., University of Missouri-Rolla, US

The interdisciplinary field of micro-electro-mechanical systems (MEMS) has emerged as a dominant field with potential for the development of commercially viable products such as sensors and actuators, automotive and aerospace electronics, computer peripherals, communication devices, [...]

Residual Stresses/Strains Analysis of MEMS

Hsu T-R., Sun N., San Jose State University, US

This paper describes the development of a finite element based MEMPACK code developed by the lead author and his graduate students. The MEMPACK code will be used for simulation and prediction of residual stresses and [...]

CMOS MEMS and their Simulation

Korvink J.G., Emmenegger M., Taschini S., Baltes H., ETH Zürich, CH

The most appropriate tools for the modelling and simulation of MEMS are strongly related to the technology used to fabricate them. CMOS MEMS are naturally combined with circuitry, and in a packaged form they are [...]