Coupling of Length Scales and Atomistic Simulation of a MEMS Device


Keywords: , , , ,

We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately model the behavior of the mechanical components of MEMS down to the atomic scale, by combining the power of an atomistic simulation with the efficiency of finite elements. This work studies the dynamics of a silicon micro-gear train and the vibrational behavior of a micron-scale quartz oscillator. The world provides a new paradigm for device design and prediction, and for the relevance of atomistic simulation.

PDF of paper:

Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 287 - 291
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3