Network-Type Modeling of Micromachined Sensor Systems

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This paper describes the development of networktype models for the simulation of micromechanical components such as spatial beams and masses. The models were coded in MASTÆ for the SABERÆ simulator and their accuracy was compared to analytical solutions and FEM simulations using ANSYSÆ. This approach leads to a library of network-type multi domain component models for the system simulation of MEMS, providing nearly FEM accuracy at network-type simulation speed.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 233 - 238
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3