MEMS – Page 25 – TechConnect Briefs

RF Measurement Techniques for Micro-Cantilever Characterization and Application

Wang C-H, Weber R.J., Iowa State University, US

The reflection coefficient (S11) of a one-port device is most sensitive to its input impedance if a matched condition is obtained. This implies two methods to measure the deflection-induced impedance change for a 1-port device [...]

Simulation and Modeling of a Micro Pressure Sensor Array

Jin J., Zhou Z., Georgia Institute of Technology, US

In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor [...]

Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

Masters N., Howell L.L., Georgia Institute of Technology, US

The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micromechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body [...]

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Ochoa E.M., Starman_Jr. L.A., Cowan W.D., Nelson_Jr. T.R., Blum Spahn O., Lott J.A., Air Force Institute of Technology, US

We characterize our novel mechanical structures for flip-bonded hybrid micro-electro-mechanically (MEM) tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MEM-TVCSELs) by comparing simulations with foundry fabricated actuators. Two of our prototypes, each with [...]

Modeling and Simulation of Silicon Microsystem of Chemical Signals

Daniel M., Szermer M., Slusarczyk K., Napieralski A., Technical University of Lodz, PL

The purpose of this paper is to introduce the new approach to the integrated microsystem oriented for water monitoring. Nowadays it becomes extremely important to analyze and estimate the chemical composition of water. Presented microsystem [...]

Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor

Innocent M., Wambacq P., Donnay S., Tilmans H., Engels M., DeMan H., Sansen W., IMEC, BE

Today’s wireless communication systems often require a high linearity for the RF building blocks. One of these blocks can be a tunable LC filter using MEMS variable capacitors (varicaps). In these filters, the varicaps are [...]

Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors

Wang W.J., Lin R.M., Nanyang Technological, SG

In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber [...]

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS

Jorgensen C., Melander D., Schmidt R., Plimpton S., Sandia National Laboratories, US

This paper describes a successful approach to improving the robustness and speed of Sandia National Laboratory’s 3-D MEMS geometry modeler through a combination of mask subdivision and code parallelization. Symptoms of the robustness problems experienced [...]