MEMS – Page 10 – TechConnect Briefs

Bulk-Titanium Waveguide – a New Building Block for Microwave Planar Circuits

Huang X.T., Todd S., Ding C., MacDonald N.C., University of California at Santa Barbara, US

We present a new topology for planar microwave transmission line: bulk titanium waveguide. The waveguide is formed by deep trench etching, dielectric gap filling, and planarization. The high aspect ratio of the resulting structure provide [...]

Towards an efficient multidisciplinary system-level framework for designing and modeling complex engineered microsystems

Clark J.V., Zeng Y., Jha P., Purdue University, US

We present advances in designing and modeling complex microsystems at the network/system-level. For design, we develop a graphical user interface that allows users to quickly configure complex systems in 3D using a computer mouse or [...]

High-Stability Numerical Algorithm for the Simulation of Deformable Electrostatic MEMS Devices

Rottenberg X., Nauwelaers B., De Raedt W., Elata D., IMEC, BE

This paper presents a novel high-stability algorithm for the simulation of the electromechanical actuation of electrostatic MEMS devices. Its stability improves on that of voltage- and charge-drive algorithms. It further offers a purely electrical simulation [...]

Non traditional dicing of MEMS devices

Sullivan S., Yoshikawa T., DISCO Corp., JP

Dicing of MEMS contains a host of challenges. Contamination, vibration, thermal, and electrical sensitivity dictate modified or non traditional dicing processes. Focusing a laser beam inside of the silicon substrate creating a modified layer is [...]

Evidence of the Existence of Complete Phononic Band Gaps in Phononic Crystal Plates

Mohammadi S., Eftekhar A.A., Khelif A., Hunt W.D., Adibi A., Georgia Institute of Technology, US

We show, by measuring the transmission through a phononic crystal (PC) plate, the evidence of the existence of large phononic band gaps (PBGs) in two-dimensional PCs made by a hexagonal (honeycomb) array of holes etched [...]

Development of A 4X4 Hybrid Optical Switch

Liao B.T., Yang Y-J, National Taiwan University, TW

In this paper, the design and fabrication of a 4x4 hybrid optical switch, which is composed of a MEMS-based silicon micro-mirror array and a mini-actuator array, is presented. The silicon micro-mirror-array structure, which includes vertical [...]

Micromachined Force Sensors for Characterization of Chemical Mechanical Polishing

Gauthier D., Mueller A., White R., Manno V., Rogers C., Anjur S., Moinpour M., Tufts University, US

Two types of microscale sensors are being developed to take in situ measurements of forces induced during chemical mechanical polishing. Flexible post sensors have been demonstrated, and floating element sensors are under development. Both sensors [...]

A novel high-sensitivity resonant viscometer realised through the exploitation of nonlinear dynamic behaviour

Waugh W.H., Gallacher B.J., Burdess J.S., Newcastle University, UK

By suitably harmonically oscillating a clamped-clamped beam immersed in fluid, it is possible to induce nonlinear dynamic behaviour. Singular jump points occur in the frequency response function, the separation of which is dependent on the [...]

Fabrication and Characterization of Thermo-pneumatic Peristaltic Micropumps

Liao H-H, Liao W-C, Liao H-H, Liao W-C, Yang Y-J, National Taiwan University, TW

In recent years, the application of microelectromechanical systems (MEMS) technology on biomedical fluidic analysis has progressed rapidly. By minimizing the system, the time of analysis and reaction can be effectively shortened. Also, the quantities of [...]

Nano-gap high quality factor thin film SOI MEM resonators

Grogg D., Tekin C.H., Badila-Ciressan D.N., Tsamados D., Mazza M., Ionescu M.A., Ecole Polytechnique Fédérale de Lausanne, CH

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization [...]