electrostatic – Page 2 – TechConnect Briefs

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Zhao X., Dankowicz H., Reddy C.K., Nayfeh A.H., Virginia Tech, US

We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law [...]

Electrostatic Tuning of a Micro-Ring Gyroscope

Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]

Criterion for Electrostatic Detachment of an Adhering Microparticle

Saito S., Himeno H., Takahashi K., Onzawa T., Tokyo Institute of Technology, JP

During micromanipulation, the influence of gravitational force becomes extremely small. The adhesional force is more significant for smaller objects. An adhered object can be detached by electrostatic interaction. In our earlier study, the electrostatic force [...]

RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

Lee J., Kim Y., Na D., Park S., Kyungpook National University, KR

In this paper, we have proposed a fabrication method of a RF-MEMS voltage tunable capacitor using Au-electroplating technique, which has one movable parallel plate with various structure of beams. We applied an electrostatic method and [...]

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators

Cheng J., Zhe J., Wu X., Farmer K.R., Modi V., Frechette L., Columbia University, US

In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with [...]

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Loughlin J.P., Fettig R.K., Moseley S.H., Kutyrev A.S., Mott D.B., NASA/Goddard Space Flight Center, US

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go [...]

Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators

Zhe J., Wu X., Cheng J., Wang J., Farmer K.R., Frechette L., Modi V., Columbia University, US

A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]

Eigenvalue Analysis of Tunable Micro-mechanical Actuator

Lee W-S., Kwon K-C., Kim B-K., Cho J-H., Youn S-K., KAIST, KR

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the [...]

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

Kweon S., Lee H., Shin H., Samsung Electronics Co.Ltd., US

Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US

We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]