RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

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In this paper, we have proposed a fabrication method of a RF-MEMS voltage tunable capacitor using Au-electroplating technique, which has one movable parallel plate with various structure of beams. We applied an electrostatic method and electroplating technique. Electroplating technique is used to fabricate various geometric structures in the surface micromaching technology. In consequence, compared with conventional structures, the theoretical tuning range, Cmax/Cmin, can be widely ranged at the applied bias voltages.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 388 - 391
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9728422-1-7