Tilmans H.A.C. – TechConnect Briefs

Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform

Jansen R., Rochus V., Goyvaerts J., Vandenboch G., van de Voort B., Neutens P., O’Callaghan J., Tilmans H.A.C., Rottenberg X., IMEC, BE

This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]

Transmit and Receive of a cMUT Cell: Modeling and Experiments

Mao S.P., Rottenberg X., Rochus V., Helin P., Verbist A., Severi S., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the modeling, simulation and experimental verification of the transmit and receive properties of a single cell capacitive micromachined ultrasonic transducer (cMUT). It is a confirmation that the equivalent circuit model provides a [...]

Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

Rochus V., Farghaly M., Rottenberg X., Tilmans H.A.C., IMEC, BE

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port [...]

Novel Nanoelectromechanical Relay Design Procedure for Logic and Memory Applications

Rottenberg X., Rochus V., Jansen R., Ramezani M., Severi S., Witvrouw A., Tilmans H.A.C., IMEC, BE

NanoElectroMechanical Structures/Systems (NEMS) have been the focus of an increasing attention from researchers in recent years for the alternative they offer to conventional CMOS for application in logics, memory and in general digital circuitry. Scaled [...]

Low Motional Impedance Bulk Acoustic Resonators Based on Metamaterials

Rottenberg X., Jansen R., Rochus V., Figeys B., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the implementation of propagating acoustic metamaterials in electrostatically transduced Bulk Acoustic Resonators (BARs) to tune by design their characteristic properties. Novel in this paper is our focus on lowering the observed motional [...]

Passive Temperature-Compensation of MEM Resonators

Rottenberg X., Jansen R., Stoffels S., De Coster J., De Raedt W., De Coster J., De Raedt W., Tilmans H.A.C., IMEC, BE

MEM-resonators are recognized key components for future sensing, wireless and communications applications. Si-based resonators have gained special interest since they offer the perspective to replace bulky quartz resonators on-chip, maintaining high Q-factor and reaching high [...]

Simulations of the Anchor Losses in MEM Disk Resonators

Paci D., Stoffels S., Tilmans H.A.C., IMEC, BE

MEM (Micro Electro Mechanical) resonators have been proposed as fundamental components in RF transmission systems; especially bulk mode resonators are very attractive devices because of their small size and their high resonance frequencies combined with [...]

Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

Stoffels S., Fernández L.J., Puers R., Tilmans H.A.C., IMEC, BE

Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz [...]

Enhanced Mass Sensing for Nanomechanical Resonators

De Greve K., De Vlaminck I., De Greve K., De Vlaminck I., Naulaerts R., Sivasubramaniam V., Lagae L., Tilmans H.A.C., Borghs G., IMEC, BE

A new method for improving the mass detection limit of nanomechanical resonators in crystalline silicon, compatible with scaling, is demonstrated. Clamped-clamped silicon beam resonators are fabricated with a non-rectangular, ‘diabolo’ cross-section starting from SOI wafers. [...]