Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform
Goyvaerts J., Jansen R., Neutens P., O’Callaghan J., Rochus V., Rottenberg X., Tilmans H.A.C., van de Voort B., Vandenboch G., IMEC, BE
This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]