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Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range

DeAnna R.G., Roy S., Zorman C.A., Mehregany M., US Army Research Laboratory, US

Finite-element analysis (FEA) modal results of 3C-SiC lateral resonant devices anchored to a Si substrate are presented as resonant frequency versus temperature. The suspended elements are etched from a 2 mm, 3C-SiC film grown at [...]

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor

Eaton W.P., Bitsie F., Smith J.H., Plummer D.W., Sandia National Laboratory, US

An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and [...]

Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs

Iyer S., Zhou Y., Mukherjee T., Carnegie Mellon University, US

Analytical models to describe coupling between different directions of motion are derived using energy methods and verified for the U-spring, crab-leg spring and the serpentine spring. Finite element analyses (FEA) are done for a range [...]

Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators

Silversmith D.J., Reid J.R., Air Force Research Laboratory, US

Previous studies of surface micro-machined polycrystalline silicon MEMS thermal micro-actuators have shown that these simple devices can provide deflections on the order of 10 micrometers at CMOS compatible drive voltages. These thermo-mechanical devices operate by [...]

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

Shkel A., Howe R.T., Horowitz R., University of California-Berkeley, US

This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion [...]

Oscillating Diaphragms

McEntee J., Bowman L., McEntee Engineering, US

The manufacture of miniature Stirling cycle cryocoolers, using standard micro-machining techniques and materials has been pursued by the authors [1]. A MEMS based cryocooler would allow integration of a cryogenic cooling system directly into a [...]

Phenomenological Model for Gas Damping of High-Speed Switches

Greywall D.S., Walker J.A., Busch P.A, Arney S.C., Bishop D.J., Boyd G.D., Frigo N.J., Goossen K.W., Iannone P.P., Ruel R.R., Yurke B., Bell Laboratories, Lucent Technologies, Inc., US

This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic [...]

Characterization of DNA Flow through Microchannels

Shrewsbury P.J., Muller S.J., Liepmann D., University of California-Berkeley, US

Advances in silicon fabrication technology enable the reproduction of laboratory apparatus, and theoretically biochemical processes, on a microscale. The implementation of this technology, however, necessitates additional study as fluid dynamics change at this scale and, [...]

Coupled Fluid-Thermal-Structural Simulations in Microvalves and Microchannels

Athavale M.M., Yang H.Q., Przekwas A.J., CFD Research Corporation, US

This paper presents the results of high-fidelity, 3-D simulations of coupled flow, heat-transfer and structural mechanics simulations of microchannels, micropumps, microvalves, and time-accurate simulations of a microoscillator. In each of these cases, the simulated results [...]

Hydrodynamic Dispersion of a Neutral Non-Reacting Solute in Electroosmotic Flows

Griffiths S.K., Nilson R.H., Sandia National Laboratory, US

To investigate hydrodynamic dispersion in electroosmotic ?ow, we have derived an asymptotic series solution for the problem of two-dimensional species transport in a tube or channel. This solution is applicable to the late-time diÆusive and [...]