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Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US

Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]

A Design Approach for Robustness Improvement of Rate Gyroscopes

Acar C., Shkel A., University of California Irvine, US

This paper reports a design concept for robustness improvement of micromachined gyroscopes. The novelty of the approach is in expanding the design space of the device by increasing the degrees-of-freedom (DOF) of the system. The [...]

Scalable Macromodels for Microelectromechanical Systems

Srinivasan V., Jog A., Fair R.B., Duke University, US

A fully automatic macromodeling methodology to generate scalable reduced-order models for microelectromechanical systems is presented in this paper. Krylov subspace methods are used to generate reduced-order models from detailed higher-order models of the device under [...]

Table-Based Numerical Macromodeling for MEMS Devices

Wu J., Carley L.R., Carnegie Mellon University, US

In this paper, we present a table-based numerical macromodeling method in which a MEMS device is modeled by a set of numerical ordinary differential equations and model functions are represented by look-up tables of numerical [...]

Full Wave Electromagnetic Analysis and Model Order Reduction for Complex Three Dimensional Structures

Balk I., He Y., IntelliSense Corporation, US

Progress in MEMS and packaging design has made significant changes in the requirements for modeling tools. In order to design a modern microdevice or interconnect system it is no longer sufficient to limit the analysis [...]

Compact Modeling and Circuit Impact of a Novel Frequency Dependence of Capacitance in RF MOSFETs

Sudhama C., Joardar K., Whitfield J., Zlotnicka A., Motorola SPS, US

The exploration and modeling of high-frequency MOSFET phenomena are vitally important because MOSFETs are emerging as candidates for active devices in front-end RF circuits operating at more than 1GHz [1-2]. In this work we present [...]

Compact Modeling of Avalanche Breakdown in pn-Junctions for Computer-Aided ESD Design (CAD for ESD)

Subramanian Y., Darling R.B., University of Washington, US

This paper presents and validates compact, physically-based electrothermal models of the avalanche process in pn junctions for use in network simulators (e.g. Saber). Self-heating effects are also included. This enables the simulation of large systems [...]

Using Pseudo Transient Continuation and the Finite Element Method to Solve the Nonlinear Poisson-Boltzmann Equation

Shestakov A.I., Milovich J.L., Noy A., Lawrence Livermore National Laboratory, US

The nonlinear Poisson-Boltzmann (PB) eequation is solved using Pseudo Transient Continuation. The PB solver is constructed by modifying the nonlinear diffusion modeule of a 3D, massively parallel, unstructured grid, finite element, radiation-hydrodynamics code. The solver [...]

New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation

Bai Z., Bindel D., Clark J., Demmel J., Pister K., Zhou N., University of California Davis, US

SUGAR is a modified nodal analysis package for 3D MEMS simulations that owes its heritage and its name to the SPICE family of circuit simulation. SUGAR has undergone the stage of proof-of-concept which showed that [...]

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Ramaswamy D., White J.K., Massachusetts Institute of Technology, US

Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus [...]