TW – Page 37 – TechConnect Briefs

A Practical Method to Extract Extrinsic Parameters for the Silicon MOSFET Small-Signal Model

Wang S.C., Huang G.W., Chen K.M., Peng A.S., Tseng H.C., Hsu T.L., National Nano Device Laboratories, TW

In this paper, the substrate parasitic has been added into the conventional MOSFET small-signal model for RFIC applications, and an extraction approach based on the curve-fitting method proposed by S. Lee also has been developed [...]

A Unified Mobility Model for Excimer Laser Annealed Complementary Thin Film Transistors Simulation

Lin H-Y, Li Y., Lin H-Y, Lee J.W., Chiu C-M, Sze S.M., Natl Nano Device Labs & Natl Chiao Tung Univ, TW

Excimer laser annealing technique has been proposed in the fabrication of low temperature polycrystalline silicon (LTPS) in the recent years, in particular for the applications to active-matrix liquid crystal display (AMLCD) [1]. In comparing with [...]

Gate Length Scaling Effects in ESD Protection Ultra-thin Body SOI Devices

Lee J.W., Li Y., Sze S.M., Natl Nano Device Labs & Natl Chiao Tung Univ, TW

In this paper we experimentaly explore the gate length scaling effects which related to the abrupt degation of electrostatic discharge (ESD) robustness for ultra-thin body silicon on insulator (SOI) devices and integrated circuits (ICs). It [...]

Inverse RIE Lag of Silicon Deep Etching

Chung C.K., Chiang H.N., National Cheng Kung University, TW

This paper reports for the first time that the phenomena and reaction mechanism of inverse reactive ion etching (RIE) lag occurs in the silicon deep RIE process without feature coalescence. This phenomenon is related to [...]

Planarize the Sidewall Ripples of Silicon Deep Reactive Ion Etching

Weng K-Y, Wang M-Y, Tsai P-H, Industrial Technology Research Institute, TW

In order to diminish the sidewall defects in silicon deep reactive ion etching process, depositing doped silicon dioxide and post-annealing processes are applied. Compared with conventional approaches, the filling-reflow surface shows nearly optical quality. the [...]

Novel Monolithic Micro Droplet Generator

Chung C.K., Lin C.J., Chen C.C., Chuang S.W., Fang Y.J., Hong Y.Z., National Cheng Kung University, TW

A novel monolithic off-shooter droplet generator has been demonstrated. The design, fabrication, bubble formation and droplet injection are described here. It is different from the conventional droplet generators of top-shooter, side-shooter and back-shooter for injection. [...]

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process

Lin C.H., Chen H-R, Du C-H, Fang W., National TsingHua University, TW

A 2.45GHz filter is fabricated by thin film bulk acoustic wave resonator (FBAR) technology. Especially, it is designed to minimize die size and to simplify fabrication process simultaneously by using inductive coupling plasma etching. The [...]

An Effective Passive Micromixer Employing Herringbone Structure

Kung C-F, Chen C-F, Chu C-C, Tseng F-G, IAM, National Taiwan University, TW

This paper proposes a high efficient micro mixer, passively employing surface tension force as driving power and Herringbone structures as vortex generator for fluid mixing. The fluidic channel was designed without sidewall and confined with [...]

Droplet Movement Induced by Nano Assembled Molecules And Micro Textures

Tseng F-G, Chien S.C., National Tsing Hua University, ESS Dept., TW

This paper introduces a droplet movement method on top of a surface prepared by gradient nano-scale self-assembled molecules on micro sized textures. Experimental results demonstrate the contact angles on hydrophobic surfaces without/with micro posts increase [...]

An Approach for Fabrication of Polymer-based Bio-analytical Microfluidic Devices

Wang M., Weng K-Y, Huang C-C, Liu W-P, Yao L-Y, Industrial Technology Research Institute, TW

Polymer is well suited as a substrate for bio-application devices due to its high dielectric constant, bio-compatible, low cost and ease of microfabrication. The primary goal is the successful fabrication of microchannels for biochip commonly [...]