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South Korea

Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor

Kim Y., Lee S-G, Park S., Kyungpook National University, KR
In this paper, we have proposed and designed the new structure of a RF-MEMS voltage tunable capacitor, which have two-movable parallel plates using electrostatic method and can be fabricated by the MEMS technology. Capacitance of [...]

Flow Cell Detection with an Optical Fiber

Kim E., Kim W., Kim E., Kim W., Lee S-G, Park S., Kyungpook National University, KR
In this experiment, we tested various optical fibers to select a suitable fiber for a effective flow cell detection. In order to align between micronozzle and optical fibers, a guide channel was fabricated by Si [...]

Thermal and Load-Deflection FE Analyses of Parylene Diaphragms

Sim W., Kim B., Choi B., Park J-O, Intelligent Microsystem Center, KR
In this study, the finite-element method(FEM) is employed in order to analyze the mechanical behavior of parylene diaphragm. Thermal and load-deflection FE analyses of flat and corrugated parylene diaphragm are performed to find an effect [...]

Transient Filling Flow into Microchannels Considering Surface Tension

Kim D.S., Lee K-C, Lee S.S., Kwon T.H., Lee K-C, Lee S.S., Pohang University of Science and Technology, KR
In this paper, we investigated, both experimentally and numerically, transient “filling” flow into microchannels, which differs from completely “filled” flow in micro-channels. An experimental flow visualization system was devised to observe the characteristics of microchannel [...]

Modeling of Deposition Process by Level Set Method

Jung H., Kwon O., Yoon S., Won T., Inha University, KR
In this paper, we report a novel method for effectively reducing the amount of calculation for a deposition rate at a specific level-set node. The proposed algorithm makes it possible to reduce the number of [...]

Eigenvalue Analysis of Tunable Micro-mechanical Actuator

Lee W-S., Kwon K-C., Kim B-K., Cho J-H., Youn S-K., KAIST, KR
An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the [...]

Modeling and Simulation of 3D Structures for Gigabit DRAM

Kwon O., Yoon S., Ban Y., Won T., Inha University, KR
In this paper, we present a 3D topography simulator, so-called 3D-SURFILER(SURface proFILER), to model a complicated 3D structure on the substrate for gigabit DRAMs. The 3D-SURFILER comprises a deposition and etching simulator employing a cell [...]

Hydrodynamic Force on a Plate Near the Plane Wall

Kim J.H., Kim K.W., Kim M.U., Kim J.H., Kim K.W., Kim M.U., Kim J.H., Kim K.W., Kim M.U., Kwak B.M., KAIST, KR
Hydrodynamic force on a plate moving in a viscous fluid near the plane wall as a model of a microelectromechanical system(MEMS) is considered. The flow field is described by the linearized Navier-Stokes equation. The method [...]

A Study on the Fluid-Structure Interaction using LSFEM

Lee S-H., Youn S-K., Yeon J-H., Jiang B-N., KAIST, KR
A study on the fluid-structure interaction using LSFEM is presented. To consider fluid-structure interaction, staggered scheme, which solves fluid and structure respectively by separate solvers in a predictor-corrector fashion, is used. To analyze fluid-structure interaction [...]

A Methodology for Modeling a Complex Geometry on Wafer from a Layout Data

Yoon S., Kwon O., Won T., Inha University, KR
This paper reports a novel methodology and its application to the modeling of a complex 3D geometry on wafer from a layout data. Our modeling method comprises the steps of: drawing a mask layout; transforming [...]

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