KR – Page 56 – TechConnect Briefs

Ultra Thin Packaging of the RF-MEMS Devices with Low loss

Park H-W., Park Y.K., Kim C.J., Kim H., Kim Y.K., Kim C.J., Kim H., Kim Y.K., Lee D.J., Park H-W., Park Y.K., Kim C.J., Kim H., Kim Y.K., Ju B.K., Korea Institute of Science and Technology, KR

RF-MEMS devices have the potential for providing an overarching circuit integration technology that can significantly reduce the size, weight and cost. In this research, as ultra thin silicon substrate which has thickness of 50um was [...]

Physical Modeling of Substrate Resistance in RF MOSFETs

Han J., Je M., Shin H., Korea Advanced Institute of Science & Technology, KR

A simple and accurate method is presented for extracting the substrate resistance of RF MOSFETs. The extraction results for 0.18 um MOSFETs are shown for various bias conditions. The dependence of the extracted substrate resistances [...]

Optical Characteristics of InAs Quantum Dots influenced by AlGaAs/GaAs Superlattice Barriers

Choi H., Jeong Y., Park Y., Lee J., Leem J-Y, Leem J-Y, Jeon M., Jeong Y., Inje University, KR

We investigated the effect of AlGaAs/GaAs superlattice barriers on the optical properties of InAs quantum dots (QDs) by using photoluminescence (PL) spectroscopy. The samples used in the present work were grown by molecular beam epitaxy [...]

A Study on the Fabrication of Micro Structure using Chemical Mechanical Micro Machining Process

Park J.M., Lee H.W., Jeong H.D., Pusan National University, KR

Single crystal silicon is widely used in the microelectronic industry. Recent advances in ultra precision machining have enabled the possibility of direct diamond turning of high quality surfaces on the brittle materials. As a brittle [...]

Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique

Park J.Y., Kim K.T., Moon S., Pak J.J., Korea Institute of Science and Technology, KR

This paper describes the novel UV-Lithography technique for fabrication of 3D feed horn mold structure array using implementation of mirror reflected parallel beam illuminator(MRPBI) system, fabrication of 3D feed horn MEMS antennas plate using plastic [...]

Nano-bending Method to Identify the Residual Stresses of MEMS Films

Kim J.G., Kim J.H., Kim Y.H., Kim J.G., Kim J.H., Kim Y.H., Hahn J.H., Lee H.Y., Kim J.G., Kim J.H., Kim Y.H., Seoul National University, KR

Surface micro-machined MEMS frequently suffer from the residual stress which might significantly decrease the performance and reliability of micro devices. It is important to accurately measure the residual stresses at manufacturing step. The Stoney’s equation [...]

High Resolution Silicon Accelerometer Using Eutectic Bonding

Kwang Y., Yeon J.C., Kim Y.H., Rhee S.W., Oh S.H., Seoul National University, KR

High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]

Country: KR