Germany
Pressure driven tough micro pump
We have developed pressure driven micro pump. They can deliver gas and liquid. That is an absolute advantage of the scale of this pump. Our pump is designed for integration in a multi well plate [...]
Country: DE
Micro bioreactor for muliwell plates with an active micro fluidic system for 3D cultivation
We have designed a micro system - suitable for parallelization - to culture cells three dimensional. Our system consists of the CellChip, a body and a pneumatically driven micro pump.The aim of our system is [...]
MEMS based examination platform for a neuro-muscular communication in a co-culture system coupled to a multi-electrode-array
Development of a sensor-connected in vitro neuromuscular co-culture system may provide a useful tool for interpreting mutual signal transfers between the cell species and for future applications in drug screening. A glass-based, autoclavable, micro fluidic [...]
Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
Crack and void free polycrystalline Lead Zirconate Titanate (PZT) films in the range of 5 µm to 10 µm have been successfully deposited on silicon substrates using a novel high rate gas flow sputtering process. [...]
Microsystems on their Way to Smart Systems
This paper will deal with two core questions: 1. The evolution of Microsystems towards Smart Systems. 2. How will the development of Smart Systems influence the future of Microsystems Technologies (MST)? Overall from the development [...]
Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications
Fiedler S., Zwanzig M., Jäger M.S., Böttcher M., Fraunhofer Institute for Reliability and Microintegration, DE
Individual submicron particles produced by non-lithographic techniques can be attractive for future microelectronic applications. Their touchless manipulation is a necessary prerequisite to use them, since they are too small to be handled via Pick&Place. We [...]
Micro to Nano – Scaling Packaging Technologies for Future Microsystems
Braun T., Becker K.-F., Bauer J., Hausel F., Pahl B., Wittler O., Mrossko R., Jung E., Ostmann A., Koch M., Bader V., Minge C., Aschenbrenner R., Reichl H., Technical University Berlin, DE
As the development of microelectronics is still driving towards further miniaturization new materials, processes and technologies are crucial for the realization of future cost effective microsystems and components. These future systems will not only consist [...]
Silicon on ceramics – a new concept for micro-nano-integration on wafer level
Fischer M., Bartsch de Torres H., Pawlowski B., Mach M., Gade R., Barth S., Hoffmann M., Müller J., Technische Universitat Ilmenau, DE
A new integration concept for silicon devices to ceramic substrates based on a new bonding technique between nano-scaled, modified Black Silicon and an adapted, unfired LTCC substrate is presented. The novel technique enables to combine [...]
Bioreactor with Integrated Nanosensor for the Recording of Extracellular Potential of Nerve Cells: Response oo Inhibitors Record with Algan/Gan Field – Effect Transistor
Cimalla I., Cimalla V., Gebinoga M., Klett M., Lübbers B., Lebedev V., Tonisch K., Cimalla I., Cimalla V., Ambacher O., Schober A., Institute of Micro- and Nanotechnology, TU Ilmenau, DE
Recently sensors based on the group III nitrides attract growing interest in the scientific comunity. It has been shown that sensors made of this material are suitable for recording action potential of muscle cells or [...]
NanoBio-Tools for Selective Activation of Toll-like receptors (TLRs)
Shukoor M.I., Natalio F., Langguth P., Schreiber W., Schröder H.C., Müller W.E.G., Tremel W., Johannes-Gutenberg University, DE
One of the emerging goals of nanotechnology is to functionalize inert materials to impart precise biological functions resulting in biocompatible nano-platforms. The exploration of the interaction between nanostructured materials and living systems is of fundamental [...]