Papers:
Dynamic Simulation of MEMS Switches using Simulink
A nodal model is implemented in Simulink and used to investigate the dynamics of electrostatically actuated MEMS switches. The model is based on reduced order 4DOF beam elements, with electrostatic forces based on simple parallel [...]
A Systematic Approach to Macromodeling Complex MEMS Devices
This paper describes a modeling methodology for arbitrary MEMS devices based on the concept of element stamps. Previously published work has shown that element stamps can be used profitably to build models of MEMS devices [...]
Static and Dynamic Analysis of Silicon NEMS
Microelectromechanical systems (MEMS) have already revolutionized many areas including communications, information technology, medical, mechanical and aerospace technologies. Nanoelectromechanical systems (NEMS) are MEMS with submicron critical dimensions. NEMS have the potential to fundamentally change the way [...]
Heat Transfer Macromodels for MEMS Devices with 3D Geometries
There are numerous heat transfer applications in MEMS, such as thermal actuating, uncooled infrared sensing, chip cooling, temperature sensing, PCR, and so on. Most of the applications need feedback loops for precise control or actuation, [...]
Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed [...]
Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems
A new algorithm has been developed for the layout based electro-thermal simulation of integrated circuits and MEMS, using simultaneous iteration. The general advantage of this method over simulator coupling is that, in contrast with the [...]
MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation
We present novel voxel-based algorithms and their application to Micro Electro Mechanical System (MEMS) design and simulation. Voxel-based techniques are known for their robustness and flexibility and have been used for MEMS design and simulation. [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7