As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]
Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]
The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]
This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]
Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical [...]
, Chen E.
, Flannery A.
, Garate J.
, Kwon H.
, Marx D.
, Nasiri S.
, Novack M.
, Sigari El
, Transparent Networks, US
The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. [...]
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under [...]
We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to [...]
In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the [...]
In the past few years, an information preservation (IP) method [1-6] has emerged as a numerical technique to analyze subsonic, micro-scale gas flows. In this method, simulated molecules move through physical space and undergo collisions [...]
Nanoscale plasticity has drawn significant attention in recent years. Extensive Experimental and numerical studies have been conducted in this field. In previous molecular dynamics (MD) simulations, the Nose-Hoover isothermal procedure was often used to maintain [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications