CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 237 - 240
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems