Equivalent Circuits, Behavioral and Multi-Level Simulation

Development of an FET Pressure Sensor Model and used to Predict Sensor Behaviour as a Function of Electrode Geometry

Hynes E., Elebert P., O'Neill M., Berney H., Lane W.A., Kelly G., Hill M., Analog Devices, IR

This paper presents the development and solution of a model to describe the behaviour of a surface micromachined FET pressure sensor. Initially an expression is developed to describe the radial deflection of the sensing diaphragm [...]

An Improved BDJ Photodetector Physical Model Implemented Under SPICE

Alexandre A., BenChouikha M., Sedjil M., Alquié G., Université Pierre et Marie Curie, FR

The physical model of the BDJ photo-detector is evaluated by comparing experimental results with simulations. The model is then improved using a parameter extraction method and by calculating the oxide layer effects. Finally the result [...]

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Schrag G., Zelder G., Wachutka G., Münich University of Technology, DE

With progressing monolithic integration of entire micro-electromechanical systems on one chip fabricated by standard IC technology we have to cope with the problem that the operation of embedded transducer elements is considerably affected by cross-coupling [...]

Integration of a Permeable Layer into Micro Coil Modelling and First Steps of Automatic Optimization

Rehfuß S., Peters D., Laur R., University of Bremen (ITEM), DE

Rectangular micro coils which are used in a wide range of applications (e.g. medical or automotive area) are the main components of appropriate wireless transmission systems for frequencies up to 20 MHz. As shown in [...]

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

A Method for Thermal Model Generation of MEMS Packages

Rencz M., Székely V., Kohári Zs., Courtois B., Micred Ltd., HU

MEMS applications are frequently thermally operated, so knowing the thermal characteristics of their packages is very important. This paper presents a method for the generation of reduced order dynamic thermal models, either from simulated or [...]

Techniques for Coupled Circuit and Micromechanical Simulation

Chen J., Kang S-M, University of Illinois at Urbana-Champaign, US

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly [...]

Electromechanical Analysis of Micromechanical SOI-Fabricated RF Resonators

Lamminmäki T., Ruokonen K., Tittonen I., Mattila T., Jaakkola O., Oja A., Seppä H., Seppälä P., Seppälä P., Kiihamäki J., Helsinki University of Technology, FI

In this paper, finite element method (FEM) simulations are used to model mechanical properties of MEMS resonators. Using a static displacement analysis the effective spring constant and mass are calculated. Non-linearity of the mechanical restoring [...]

A FEM Based Network Approach for the Simulation of Miniaturized Electromagnetic Devices

Gollee R., Gerlach G., Dresden University of Technology, DE

The paper proposes a new computational approach for analyzing miniaturized electromagnetic devices. This approach is based on a general structure of an equivalent network for the coupled electromagnetic problem. It enables automated derivation of the [...]

A Synthesizable Low Power VHDL Model of the Exact Solution of Three Dimensional Hyperbolic Positioning System

Bucher R., Misra D., New Jersey Center for Wireless and Telecommunication, US

This paper presents a synthesizable low power VHDL model of a three-dimensional hyperbolic positioning system algorithm. The algorithm derives the equations needed to obtain an exact solution for the three dimensional location of a mobile [...]

Compact Models for Smart Pixels with Smart Illumination

Subramanian Y., Azadeh M., Darling R.B., University of Washington, US

Smart Pixels with Smart Illumination (SPSI) is a recently developed technology that enables the monolithic integration of two functionalities-optical illumination and detection- into arrays of optoelectronic ‘pixels’ in a compact and robust manner. To facilitate [...]

Hardware Realization of Biological Mechanisms Using VHDL and FPGAs

Botros N., Akaaboune M., Alghazo J., Alhreish M., Southern Illinois University, US

In this paper we present a hardware realization of a simplified blood-pressure regulation mechanism. The mechanism has been proposed and then modeled by using Hardware Description Language (VHDL). After verifying the simulation results, Computer Aided [...]

Modeling of High-speed Diamond Microswitch

Schmid P., Adamschik M., Ertl S., Kohn E., University of Ulm, DE

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based [...]

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