Papers:
Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University
This paper presents an overview of microelectromechanical systems (MEMS) research being conducted at Duke University. The Duke University MEMS research program encompasses initiatives in both application design and design automation. These two areas serve synergistic [...]
Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and Simulations
Detailed 2D electromechanical simulations of electrostatically-actuated beams reveal phenomena not captured by 1D or quasi-2D simulations. The behavior of the beam when in contact with a dielectric layer is studied. Capacitance-voltage measurements are used to [...]
1/f Noise Characterization of a Surface-Micromachined Suspended Gate FET
This paper presents the first detailed characterization and modeling of 1/f noise in a depletion mode surface-micromachined suspended gate nMOSFET. The results are compared and contrasted with the 1/f noise characteristics of a standard depletion [...]
Fast Inductance Extraction of 3-D Structures with Non-Constant Permeabilities
In this paper we present a discretized integral formulation for calculating the frequency-dependent inductance and resistance for 3-D structures that contains permeable materials. The method uses a magnetic surface charge formulation, and we present analytic [...]
Augmented Reality as an Interactive Tool for Microscopic Imaging, Measurement and Model Based Verification of Simulated Parts
Presently microsystems are gaining in interest. Microsystems are small, independent modules, incorporating various functions, such as electronic, micro mechanical, data processing, optical, chemical, medical and biological functions. Though improving the manufacturing technologies, the measuring of [...]
Simple Method of Characterizing CMOS Channel Dopant Profiles Using CV Technique
In CMOS process and device simulations, characterization of complete dopant profiles in the channel region is essential for accurate simulations. We have developed a simple, fast and inexpensive methodology for characterizing CMOS channel dopant profiles [...]
Rational RSM Models for Device Characteristics as Functions of Process Parameters
Conventional polynomial Response Surface Methodology (RSM) fails to provide oscillation-free analytical models for some device data with singularity like subthreshold slope vs threshold adjustment dose, poly gate length vs stepper defocus, etc. New type of [...]
Methodology for Calibrating Process and Device Simulators by Extracting Model Parameters from Electrical Data
This paper describes a physically based methodology for calibrating 2D semiconductor process and device simulators. The calibration begins with the determination of 1D and 2D doping profiles by means of extracting model parameters from electrical [...]
Validation and Calibration of Electrothermal Device Models Using Infrared Laser Probing Techniques
As it has recently been demonstrated, the internal distribution of carrier concentration and temperature is accessible to accurate measurements by various infrared laser probing techniques. In this work we present an advanced method for the [...]
Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces
We analyze and characterize the laterally induced electrostatic repulsive force generated by the in-plane asymmetry of electrostatic field. Basic concept of the electrostatic repulsive actuation is presented. Fundamental nature of the repulsive force has been [...]
Inductance Extraction by Means of the Monte Carlo Method
This paper presents a novel inductance extraction procedure which is based on a Monte Carlo sampling technique. Partial inductances for static current distributions can be computed efficiently and with small memory requirements, thus enabling the [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3