Rational RSM Models for Device Characteristics as Functions of Process Parameters

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Conventional polynomial Response Surface Methodology (RSM) fails to provide oscillation-free analytical models for some device data with singularity like subthreshold slope vs threshold adjustment dose, poly gate length vs stepper defocus, etc. New type of RSM model is proposed in form of rational polynomials which are generalization of the conventional polynomials. This approach delivers oscillation-free RSM surfaces and intuitive interpretation of the data.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 205 - 208
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3