Advanced Materials & Manufacturing


Advanced large scale colloidal lithography for sub-100 nm direct and indirect nanostructuring: application to silicon and metals

, , , , , , ,
Actually nano-sphere lithography is a great technique to fabricate structures at large scale, therefore using self-assembly as a bottom-up approach nano scale materials. In this study, combining Reactive Ion Etching(RIE) and polystyrene(PS) nano-sphere lithography we [...]

Journal: TechConnect Briefs
Volume: 4, Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2015
Published: June 14, 2015
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Manufacturing
ISBN: 978-1-4987-4730-1