Papers – Page 47 – TechConnect Briefs

Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer

Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

Micro-fabricated sensors made of a 20 µm thick bulk-silicon device layer for electrostatic voltage measurements are presented. A rotational, seesaw-like actuator with two electrically isolated electrodes on its ends forming parallel-plate capacitors with opposing electrodes [...]

Contactless Micro Position and Angular Sensor Device Based on Micro Structured Polymer Magnets

Waldschik A., Feldmann M., Dittmer J., Büttgenbach S., Technische Universität Braunschweig, DE

In this abstract we present a contactless micro position and angular sensor system which consists of fixed commercial magnetic sensors, such as hall sensors and a movable part with integrated micro structured polymer magnets. This [...]

BioMEMS for Mitochondriaa Medicine

Padmaraj D., Zagozdzon-Wosik W., Xie Lei-Ming, Pijanowka D., Miller J.H., Grabiec P., Wosik J., Zagozdzon-Wosik W., University of Houston, US

We designed and fabricated BioMEMS for applications in subcelullar level studies, more specifically for monitoring complementary parameters important in mitochondria medicine.BioMEMS were first simulated using COMSOL 3.4 and then fabricated as an SU-8 based microfluidic [...]

Dielectrophoresis and Comsol Simulation of Cell Entrapment At Electrodes

Padmaraj D., Zagozdzon-Wosik W., Pande R., Miller J.H., Xie L-M, Wosik J., Zagozdzon-Wosik W., University of Houston, US

Dielectric properties of biological samples change with frequency of the interrogating electric field therefore can be used to obtain information about structures and various kinetic as well as bio-physical and –chemical processes in the cells. [...]

Design of Multi – Dimensional Variable Capacitors for RF MEMS

Lamba V.K., Engles D., Malik S.S., Gupta A., HCTM Kaithal, IN

Abstract— In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. The RF MEMS variable capacitor is designed [...]

Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications

Nam S-H, Kim M.H., Hyun J.S., Boo J.-H., Sungkyunkwan University, KR

Silicon carbide thin films were deposited on Si(100) substrates by metal-organic chemical vapor deposition(MOCVD) in high vacuum condition(2.010-7 Torr) using 1,3-disilabutane as a single source precursor which contains silicon and carbide in 1:1 ratio at [...]

Fabrication of Nanostructures on Curved Surfaces Using PDMS Stamp

Farshchian B., Park S., Louisiana State University, US

In this study we report on a simple and effective process that allows direct imprinting of micro- and nanostructures on concave and convex substrates using a flexible stamp and pressurized air . One of the [...]

Nanocomposite Contact Material for MEMS Switches

Ding C., MacDonald N.C., university of california, santa barbara, US

This work reports the development of a nanostructured composite contact material for improving the contact reliability of MEMS switches. The nanocomposite material was integrated into a bulk titanium MEMS (BT-MEMS) switch which was fabricated using [...]

Pneumatically driven Auxiliary Micro Tools for Desktop Factories

Hoxhold B., Büttgenbach S., Technische Universität Braunschweig, DE

This paper presents the design and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro [...]

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization

Je S.-S., Kim J., Kozicki M.N., Chae J., Arizona State University, US

We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits [...]